GYPRO2300LD

GYPRO® product line is a new generation of Micro-ElectroMechanical Systems (MEMS) angular rate sensor specifically designed for demanding applications. The MEMS transducer is manufactured using Tronics proprietary vacuum wafer-level packaging technology based on micro-machined thick single crystal silicon. The integrated circuit (IC) provides a stable primary antiphase vibration of the 'drive' proof masses, thanks to electrostatic comb drives. When the sensor is subjected to a rotation, the Coriolis force acts on the 'sense' proof masses and forces them into a secondary anti-phase movement perpendicular to the direction of drive vibration, which is itself counter-balanced by electrostatic forces. The sense closed loop operates as an electromechanical ΣΔ modulator providing a digital output. This output is finally demodulated using the drive reference signal.